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1

ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Porous SiOCH Integration: Etch Challenges with a Trench First Metal Hard Mask Approach

Possémé, Nicolas, David, Thibaut, Chevolleau, Thierry, Darnon, Maxime, Brun, Philippe, Guillermet, Marc, Oddou, Jean Pierre, Barnola, Sebastien, Bailly, Fanny, Bouyssou, Regis, Ducote, Julien, Huran

Year:

2011

Language:

english

File:

PDF, 380 KB

english, 2011

2

Application of monolithic strip line radiation detector based on semi-insulating GaAs in X-ray portable scanner

F. Dubecký, P. Ščepko, D. Loukas, B. Zaťko, V. Sekerka, V. Nečas, A. Perďochová, M. Sekáčová, P. Boháček, M. Hudec, J. Huran

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2004

Language:

english

File:

PDF, 344 KB

english, 2004

3

Further studies of N doped a-SiC:H films deposited by PECVD and annealed by pulse electron beam

J Huran, I Hotový, A.P Kobzev, N.I Balalykin

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 94 KB

english, 2004

4

Investigation of light element contents in subsurface layers of silicon

A.P. Kobzev, J. Huran, D. Maczka, M. Turek

Journal:

Year:

2009

Language:

english

File:

PDF, 290 KB

english, 2009

5

Preparation of nickel oxide thin films for gas sensors applications

I Hotovy, J Huran, L Spiess, S Hascik, V Rehacek

Journal:

Sensors and Actuators B: Chemical

Year:

1999

Language:

english

File:

PDF, 850 KB

english, 1999

6

PECVD silicon carbide deposited at different temperature

J. Huran, B. Zaťko, I. Hotový, J. Pezoldt, A. P. Kobzev, N. I. Balalykin

Journal:

Czechoslovak Journal of Physics

Year:

2006

Language:

english

File:

PDF, 298 KB

english, 2006

7

The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition

Huran, Jozef, Valovič, Albín, Boháček, Pavol, Shvetsov, Valery N., Kobzev, Alexander P., Borzakov, Sergey B., Kleinová, Angela, Sekáčová, Mária, Arbet, Juraj, Sasinková, Vlasta

Journal:

Applied Surface Science

Year:

2013

Language:

english

File:

PDF, 689 KB

english, 2013

8

[IEEE The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Smolenice Castle, Slovakia (Oct. 17-21, 2004)] The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - New results of low temperature PECVD amorphous silicon carbide

Huran, J., Hotovy, I., Kobzev, A.S., Balalykin, N.I.

Year:

2004

Language:

english

File:

PDF, 814 KB

english, 2004

9

SPIE Proceedings [SPIE SPIE Optics + Photonics for Sustainable Energy - San Diego, California, United States (Sunday 9 August 2015)] Reliability of Photovoltaic Cells, Modules, Components, and Systems VIII - Raman spectroscopy study of SiC thin films prepared by PECVD for solar cell working in hard environment

Dhere, Neelkanth G., Wohlgemuth, John H., Jones-Albertus, Rebecca, Sasinková, Vlasta, Huran, Jozef, Kleinová, Angela, Boháček, Pavol, Arbet, Juraj, Sekáčova, Mária

Year:

2015

Language:

english

File:

PDF, 2.29 MB

english, 2015

10

SPIE Proceedings [SPIE SPIE Optics + Photonics for Sustainable Energy - San Diego, California, United States (Sunday 9 August 2015)] Reliability of Photovoltaic Cells, Modules, Components, and Systems VIII - FTIR spectroscopy of silicon carbide thin films prepared by PECVD technology for solar cell application

Dhere, Neelkanth G., Wohlgemuth, John H., Jones-Albertus, Rebecca, Kleinová, Angela, Huran, Jozef, Sasinková, Vlasta, Perný, Milan, Šály, Vladimír, Packa, Juraj

Year:

2015

Language:

english

File:

PDF, 3.24 MB

english, 2015

11

[IEEE 2010 3rd International Conference on Advanced Computer Theory and Engineering (ICACTE 2010) - Chengdu, China (2010.08.20-2010.08.22)] 2010 3rd International Conference on Advanced Computer Theory and Engineering(ICACTE) - The computer simulation of the spiral bevel gear with equal conjugate curvature

Year:

2010

Language:

english

File:

PDF, 1.33 MB

english, 2010

12

[WORLD SCIENTIFIC Proceedings of the 5th Italian Conference — Extended to Mediterranean Countries - Lecce, Italy (12 – 16 February 2000)] Sensors and Microsystems - THIN FILMS FOR GAS SENSOR

HOTOVY, I., CAPKOVIC, R., HURAN, J., SICILIANO, P., RELLA, R., SPIESS, L.

Language:

english

File:

PDF, 412 KB

english

13

Computing the Position-Spread tensor in the CAS-SCF formalism II: Spin Partition

Huran, Ahmad W., Leininger, Thierry, Bendazzoli, Gian Luigi, Evangelisti, Stefano

Journal:

Chemical Physics Letters

Year:

2016

Language:

english

File:

PDF, 612 KB

english, 2016

14

Novel two-dimensional siliconâcarbon binaries by crystal structure prediction

Borlido, Pedro, Huran, Ahmad W., Marques, Miguel A. L., Botti, Silvana

Journal:

Physical Chemistry Chemical Physics

Year:

2020

File:

PDF, 10.84 MB

2020

15

Use of a CCl2F2/H2 plasma for the reactive ion etching of GaAs

A Horniaková, J Huran, Š Haščík

Journal:

Year:

1993

Language:

english

File:

PDF, 829 KB

english, 1993

16

Silicon trench etching in a multi-frequency discharge reactor

Š Haščik, A Horniaková, J Huran

Journal:

Year:

1994

Language:

english

File:

PDF, 575 KB

english, 1994

17

Properties of amorphous silicon carbide films prepared by PECVD

J Huran, L Hrubcin, AP Kobzev, J Liday

Journal:

Year:

1996

Language:

english

File:

PDF, 227 KB

english, 1996

18

Role of new ohmic electrode metallization in detection performance of bulk semi-insulating GaAs radiation detectors

Pavol Boháček, Bohumír Zat’ko, František Dubecký, Štefan Chromík, Jozef Huran, Mária Sekáčová

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2008

Language:

english

File:

PDF, 337 KB

english, 2008

19

Study of wide band gap nanocrystalline silicon carbide films for radiation imaging detectors

J. Huran, B. Zat'ko, P. Boháček, V.N. Shvetsov, A.P. Kobzev

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2011

Language:

english

File:

PDF, 206 KB

english, 2011

20

On the spectrometric performance limit of radiation detectors based on semi-insulating GaAs

B. Zaťko, F. Dubecký, P. Boháček, E. Gombia, P. Frigeri, R. Mosca, S. Franchi, J. Huran, V. Nečas, M. Sekáčová, A. Förster, P. Kordoš

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2004

Language:

english

File:

PDF, 332 KB

english, 2004

21

Role of electrode technology in radiation detector based on semi-insulating InP in development of detector array

F. Dubecký, P. Boháček, B. Zaťko, M. Sekáčová, J. Huran, V. Šmatko, R. Fornari, E. Gombia, R. Mosca, P.G. Pelfer

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2004

Language:

english

File:

PDF, 638 KB

english, 2004

22

Digital X-ray portable scanner based on monolithic semi-insulating GaAs detectors: General description and first “quantum” images

F. Dubecký, A. Perd’ochová, P. Ščepko, B. Zat’ko, V. Sekerka, V. Nečas, M. Sekáčová, M. Hudec, P. Boháček, J. Huran

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2005

Language:

english

File:

PDF, 523 KB

english, 2005

23

A new kind of quasi-ohmic metallization in semi-insulating GaAs: Study of electrical characteristics

František Dubecký, Bohumír Zaťko, Pavel Hubík, Enos Gombia, Pavol Boháček, Jozef Huran, M. Sekáčová

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2009

Language:

english

File:

PDF, 283 KB

english, 2009

24

Development and evaluation of semi-insulating GaAs detectors in hot plasmas diagnostics

Bohumír Zaťko, František Dubecký, Pavol Boháček, Jozef Huran, Vladimír Nečas, Leszek Ryć

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2011

Language:

english

File:

PDF, 317 KB

english, 2011

25

NiO-based nanostructured thin films with Pt surface modification for gas detection

I. Hotovy, J. Huran, L. Spiess, H. Romanus, D. Buc, R. Kosiba

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 378 KB

english, 2006

26

Effect of deposition temperature on the properties of amorphous silicon carbide thin films

J. Huran, I. Hotový, J. Pezoltd, N.I. Balalykin, A.P. Kobzev

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 163 KB

english, 2006

27

Preparation and characterization of NiO thin films for gas sensor applications

I Hotový, J Huran, L Spiess, R Čapkovic, Š Haščı́k

Journal:

Year:

2000

Language:

english

File:

PDF, 242 KB

english, 2000

28

Investigation of radiation damage in N doped a-SiC : H films annealed by pulsed electron beam

J Huran, I Hotový, Š Haščı́k, A.P Kobzev, N.I Balalykin

Journal:

Year:

2000

Language:

english

File:

PDF, 125 KB

english, 2000

29

Influence of nitrogen concentration on conductivity of N-doped a-SiC:H films deposited by PECVD

J Huran, I Hotovỳ, A.P Kobzev, N.I Balalykin

Journal:

Year:

2002

Language:

english

File:

PDF, 132 KB

english, 2002

30

The influence of process parameters and annealing temperature on the physical properties of sputtered NiO thin films

I. Hotovỳ, J. Huran, L. Spiess, J. Liday, H. Sitter, Š. Hašcı&amp, #x0301, k

Journal:

Year:

2002

Language:

english

File:

PDF, 354 KB

english, 2002

31

Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition

J Huran, J Šafránková, A.P. Kobzev

Journal:

Year:

1998

Language:

english

File:

PDF, 252 KB

english, 1998

32

Thermal stability of NbN films deposited on GaAs substrates

I Hotový, J Huran, D Búc, R Srnánek

Journal:

Year:

1998

Language:

english

File:

PDF, 388 KB

english, 1998

33

Reactively sputtered NbN Schottky contacts on GaAs and their thermal stability

I Hotový, J Huran, b Š Haščíkb, T Lalinský

Journal:

Year:

1998

Language:

english

File:

PDF, 299 KB

english, 1998

34

Correlation of crystal defects and galvanomagnetic parameters of semi-insulating InP with performance of radiation detectors fabricated from characterised materials

P Boháček, D Korytár, C Ferrari, F Dubecký, B Surma, B Zat'ko, V Šmatko, J Huran, R Fornari, M Sekáčová, S Strzelecka

Journal:

Materials Science and Engineering: B

Year:

2002

Language:

english

File:

PDF, 300 KB

english, 2002

35

The influences of preparation parameters on NiO thin film properties for gas-sensing application

I. Hotovy, J. Huran, P. Siciliano, S. Capone, L. Spiess, V. Rehacek

Journal:

Sensors and Actuators B: Chemical

Year:

2001

Language:

english

File:

PDF, 500 KB

english, 2001

36

Deep Plasma Etching of Si in a CBrF3 Plasma through a Submicron Single Layer Electron-Beam Lithographic Mask

J. Huran, A. Horniaková, Š. HašČík

Journal:

physica status solidi (a)

Year:

1992

Language:

english

File:

PDF, 214 KB

english, 1992

37

Etching of GaAs in a Multi-Frequency Discharge Reactor

A. Horniaková, J. Huran, Š. Haščík

Journal:

physica status solidi (a)

Year:

1993

Language:

english

File:

PDF, 287 KB

english, 1993

38

Properties of NbN Films Prepared by Reactive Magnetron Sputtering

I. Hotový, J. Huran

Journal:

physica status solidi (a)

Year:

1993

Language:

english

File:

PDF, 204 KB

english, 1993

39

Study of enhanced magnetron sputtering process of NiO by using flow modulation of oxygen

I. Hotovy, J. Huran, D. S. McPhail

Journal:

Czechoslovak Journal of Physics

Year:

2004

Language:

english

File:

PDF, 275 KB

english, 2004

40

RBS study of amorphous silicon carbide films deposited by PECVD

J. Huran, I. Hotovy, A. P. Kobzev, N. I. Balalykin

Journal:

Czechoslovak Journal of Physics

Year:

2004

Language:

english

File:

PDF, 570 KB

english, 2004

41

NiO nanostructured films with Pt coating prepared by magnetron sputtering

I. Hotovy, D. Donoval, J. Huran, S. Hascik, L. Spiess, M. Gubisch, S. Capone

Journal:

Czechoslovak Journal of Physics

Year:

2006

Language:

english

File:

PDF, 394 KB

english, 2006

42

Investigation of Etched Trenches in Technology of LEC Semi-Insulating GaAs Monolithic Linear Detector Array

A. Perd'ochová, F. Dubecký, V. Nečas, Š. Haščík, M. Sekáčová, J. Huran

Journal:

Nuclear Physics B - Proceedings Supplements

Year:

2006

File:

PDF, 229 KB

2006

43

Deposition and properties of nickel oxide films produced by DC reactive magnetron sputtering

I Hotový, J Huran, J Janík, AP Kobzev

Journal:

Year:

1998

Language:

english

File:

PDF, 251 KB

english, 1998

44

Characterization of sputtered NiO films using XRD and AFM

I. Hotovy, J. Huran, L. Spiess

Journal:

Journal of Materials Science

Year:

2004

Language:

english

File:

PDF, 323 KB

english, 2004

45

Application of the ERD method for hydrogen determination in silicon (oxy) nitride thin films prepared by ECR plasma deposition

L. Hrubčín, J. Huran, R. Šandrik, A.P. Kobzev, D.M. Shirokov

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1994

Language:

english

File:

PDF, 345 KB

english, 1994

46

The Mathematical and Computer Aided Analysis of the Contact Stress of the Surface With 4th Order

Journal:

Physics Procedia

Year:

2012

Language:

english

File:

PDF, 191 KB

english, 2012

47

Computer Calculation of the Profile of the Chamfer Miller

Journal:

Physics Procedia

Year:

2012

Language:

english

File:

PDF, 646 KB

english, 2012

48

Computer Simulation of the Chamfer Miller for the Gears

Journal:

Physics Procedia

Year:

2012

Language:

english

File:

PDF, 393 KB

english, 2012

49

Computer Aided Simulation Machining Programming In 5-Axis Nc Milling Of Impeller Leaf

Journal:

Physics Procedia

Year:

2012

Language:

english

File:

PDF, 790 KB

english, 2012

50

Electrical properties of semi-insulating GaAs irradiated with neutrons

M Morvic, P Boháček, J Betko, F Dubecký, J Huran, M Sekáčová

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2002

Language:

english

File:

PDF, 146 KB

english, 2002